Professor Ooe, Professor Kodama
Scanning electron microscope equipped with cold cathode field emission electron gun and computer control
Electron microscopes are absolutely essential in quality control during the R&D and production processes for semiconductor devices such as transistors and integrated circuits, which are ubiquitous in personal computers and other consumer electronics products. While microscopes use light, electron microscopes use short-wavelength electrons that allow them to make visible minute articles. In this laboratory, participants seek to create higher-performance electron microscopes with more advanced functions by developing electron guns, detectors, and signal processing systems, as well as by analyzing the behavior of electrons in a vacuum and developing technologies for measuring nano-structures.
Raman/photoluminescence spectroscopy instrument used for analyzing carbon structures
Several types of carbon structures including diamonds, graphene, carbon nanowalls, and carbon nanotubes are fabricated from methane/hydrogen mixtures using plasma-enhanced chemical vapor deposition (PEVCD) techniques. The laboratory focuses on the development of next-generation electronic devices that take advantage of the features of such carbon structures. There are great expectations for the practical application of a variety of new devices, such as gas sensors, bio-sensors, and fuel cells, that use carbon nanowalls and carbon nanotubes.
Associate Professor Murata
Multi-emitter evaluation device
Organic EL (electroluminescence) displays hold great promise as a next-generation display for use on smartphones and tablet computers. Another type of promising next-generation display for large, thin applications is the FE (field emission) display. In principle, the display gives off electrons in a vacuum from a flat field-emission electron source, and these electrons strike a fluorescent body to give off light. In this laboratory, participants develop multi-emitter evaluation technologies and field-emission simulation technologies as they strive to optimize the shape and alignment of the field emission array and carbon nanotubes that constitute the flat field-emission electron source.